Nanostructures, Inc.

Capacitance sensors based on fixed and variable-area silicon membranes are useful for multi-range pressure and acoustic sensing applications.

Our inductively-coupled plasma deep reactive
ion etcher is being used to fabricate
biomedical devices for testing and research.

Custom microfabrication of medical implants,
lab-on-a-chip platforms, biohazard test devices,
and medical test and drug delivery systems.

Silicon v-grooves and micro-optical benches are used for precise alignment of fiber-optic telecommunications and laser-based systems for many applications.

Application-specific membranes and arrays are built
on silicon membrane platforms for microfiltration, calibration grids, and sensing arrays.

We work with customers through purchase orders
and R&D/engineering contracts. We handle micro-fabrication jobs of varying sizes and scopes, from R&D, to small-lot prototypes, to volume manufacturing.

nanostructures

Custom Microfabrication

Photo courtesy of Parallel Synthesis Technologies, Inc.

Technology

Nanostructures, Inc., has enabling technologies based on (a) patterned thin film devices on membranes and thin substrates and (b) bulk silicon etching of deep microstructures. These technologies make it possible to increase the functionality and ranges of sensors and medical devices. Microfabrication also allows the design of smaller, more compact, and less expensive devices.

Nanostructures' variable-area membrane capacitance technology, developed in conjunction with Horizon Technology Group, can be applied to capacitive sensors, including pressure and acoustic sensors, as well as to optical systems and scanning and imaging devices.

Our hybrid wet/DRIE etch technology has been applied to biomedical testing systems, and has potential in other applications, including MEMS, that require deep microstructures.

We have combined membrane fabrication and microfabrication to develop novel devices, such as microsieves and grid arrays, that require ultrathin substrates.

We provide our own mask design and layout for most custom fabrication projects. In addition, we have partnered with Martin Photomasks to serve our high-end design and mask needs for advanced customer applications.

Nanostructures is a corporate user at both the Stanford Nanofabrication Facility and at the University of California Santa Barbara Nanotech. We have additional technology partnerships in custom processes. Included are Process Specialties, providing standard semiconductor related coatings; Strataglass for specialized chemical vapor deposition; Lance Goddard Associates for metal coatings; and American Precision Dicing for specialized and advanced wafer dicing.