Capacitance sensors based on fixed and variable-area silicon membranes are useful for multi-range pressure and acoustic sensing applications.

Our inductively-coupled plasma deep reactive
ion etcher is being used to fabricate
biomedical devices for testing and research.

Custom microfabrication of medical implants,
lab-on-a-chip platforms, biohazard test devices,
and medical test and drug delivery systems.

Silicon v-grooves and micro-optical benches are used for precise alignment of fiber-optic telecommunications and laser-based systems for many applications.

Application-specific membranes and arrays are built
on silicon membrane platforms for microfiltration, calibration grids, and sensing arrays.

We work with customers through purchase orders
and R&D/engineering contracts. We handle micro-fabrication jobs of varying sizes and scopes, from R&D, to small-lot prototypes, to volume manufacturing
  Custom Microfabrication

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Alex R. Shimkunas, President, Nanostructures, Inc.

Alex Shimkunas is a founder of Nanostructures, and has over 35 years experience in research and development in the optical and electronics industries.  He is responsible for business and technical management at Nanostructures.  He has experience in thin film processing and design in sensors, electronic devices, biotechnology and biomedical devices, optical telecommunications components, and optical coatings.

Mr. Shimkunas received his B.S. and M.S. degrees in Physics from the University of Chicago in 1965 and 1967, respectively.  He is a member of the American Vacuum Society, has authored and co-authored numerous technical publications, and holds six U.S. patents.

Philip E. Mauger, Vice President, Nanostructures, Inc.

Dr. Philip Mauger is a founder of Nanostructures, and has over 20 years experience in research and development in the electronics industry. He has been responsible for the microfabrication activities at Nanostructures since its beginning in 1987. His experience includes a wide range of silicon and thin film processing techniques with an emphasis on micromachining and related processes. His design experience includes pressure, acoustic, and acceleration sensors, micromachined mirrors, optical fiber and laser diode mounts, microfluidics, retinal implants, and a variety of microfabricated thin-film structures.

Dr. Mauger graduated with a B.A. degree in physics and mathematics from Drew University in 1975 and an M.S. and Ph.D. degrees in physics from Cornell University in 1979 and 1982. His graduate research was on properties of transition metal hydrides. He is the author of a number of papers and is an inventor on 7 issued and several pending patents.

Copyright 2006 Nanostructures, Inc. 3070 Lawrence Expy. Santa Clara, CA 95051, Phone:(408)733-4345 Fax:(408)733-4347

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