Capacitance sensors based on fixed and variable-area silicon membranes are useful for multi-range pressure and acoustic sensing applications.

Our inductively-coupled plasma deep reactive
ion etcher is being used to fabricate
biomedical devices for testing and research.

Custom microfabrication of medical implants,
lab-on-a-chip platforms, biohazard test devices,
and medical test and drug delivery systems.

Silicon v-grooves and micro-optical benches are used for precise alignment of fiber-optic telecommunications and laser-based systems for many applications.

Application-specific membranes and arrays are built
on silicon membrane platforms for microfiltration, calibration grids, and sensing arrays.

We work with customers through purchase orders
and R&D/engineering contracts. We handle micro-fabrication jobs of varying sizes and scopes, from R&D, to small-lot prototypes, to volume manufacturing
.
nanostructures
  Custom Microfabrication

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  Company

Since its founding in 1987, Nanostructures has worked on a variety of contract research and engineering projects in addition to providing custom manufacturing services.  Our earliest work included development contracts in membrane fabrication technology for pressure sensors and advanced lithography masks.  Today we continue to apply and develop membrane technologies for medical implants, pressure and acoustic sensors, and microsieves, and we have many additional technological, engineering, and service capabilities.  Our expertise ranges from thin film device fabrication to advanced methods of deep silicon microfabrication.  The unique combination of our diverse capabilities and experience allows us to provide engineering and manufacturing solutions for a broad range of applications and industries.

Founders

History

1987    Founding of Nanostructures, Inc.

1991    Silicon membrane technology for advanced lithography

1993    Silicon v-groove fabrication technology

1996    Membrane-based capacitance pressure sensors
           
1997    Development of first subretinal silicon device for Optobionics Corp.
           
1999    Silicon optical benches and micromachined chemical sensors
           
2001    Acoustic sensor development with Horizon Technology Group
           
2002    Deep Reactive Ion Etching (DRIE) processes for biomedical and biotechnology devices
           
2003    Microsieve devices based on silicon membranes
           
            Humidity sensor development with Horizon Technology Group
           
2004    Quantum interference device development with Avto Metals plc
           
2005    Production ramp-up of DRIE fabrication of devices for biotech and biomedical instrumentation


Copyright © 2006 Nanostructures, Inc. 3070 Lawrence Expy. Santa Clara, CA 95051
info@nanostructures.com, Phone:(408)733-4345 Fax:(408)733-4347

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