Deep Silicon Microfabrication
V-Grooves and Silicon
Silicon and Silicon Nitride Membranes
and Custom Manufacturing
Capacitive sensors based on fixed and variable-area silicon membranes are useful for extended-range
pressure and acoustic sensing applications.
Our inductively-coupled plasma deep reactive
ion etcher is used in fabricating
for testing and life sciences research.
Custom microfabrication of medical implants, microfluidic devices such as
platforms, biohazard test devices,
medical test and
drug delivery systems.
Silicon v-grooves and silicon optical benches are used for precise alignment of optical fibers and microlenses. These components are widely used in fiber-optic telecommunications and fiber-coupled diode lasers.
Silicon and silicon nitride membranes are used in microfabricated sensors, microsieves, calibration and microscopy grids, TEM windows and sensing arrays.
We handle microfabrication jobs of varying
and scopes, from R&D, to small-lot
prototypes, to volume manufacturing.
Last update: March 2012 - Nanostructures,
Inc. provides custom microfabrication and MEMS foundry services
for biomedical, telecommunications, and industrial sensor applications.
Since 1987, Nanostructures has worked with customers from initial design
concept to prototype manufacture. Nanostructures provides a full spectrum
of services to accommodate our customers in any step of their product
© 2006 Nanostructures, Inc. 3070 Lawrence
Expy. Santa Clara, CA 95051
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